Bruker Introduces New AFM Semiconductor Characterization Solution
April 04 2013 - 7:00AM
Business Wire
Bruker announced today the release of the Dimension Icon®
SSRM-HR, a new atomic force microscope (AFM) configuration
including the Scanning Spreading Resistance Microscopy (SSRM)
module, designed specifically for high-resolution (HR)
semiconductor characterization. Integrating Bruker’s
industry-leading Dimension Icon AFM platform with an environmental
control system capable of 1ppm gas purity and high-vacuum control,
the Dimension Icon SSRM-HR system provides vastly improved
repeatability and spatial resolution in semiconductor carrier
profiling. As confirmed by Imec (www.imec.be), buried gate oxide
layers as thin as 5Å are detected routinely.
Dimension Icon SSRM-HR (Photo: Business
Wire)
“As our customers continue to improve their products to follow
the semiconductor roadmap, higher spatial resolution electrical
characterization is a key requirement,” said David V. Rossi,
Executive Vice President and General Manager of Bruker's AFM
Business. “The new Dimension Icon SSRM-HR combines the leading
productivity and large programmable stage of our top performance
AFM platform with atomic resolution, and the most accurate carrier
profiling optimization to meet the specific demands of
next-generation technology nodes.”
“We chose Bruker because they offer the only solution that meets
our needs,” added Prof. Vandervorst, Imec Fellow and Department
Head, Materials and Components Analysis, based in Leuven, Belgium.
“Our decision followed a rigorous evaluation of spatial resolution
and repeatability in carrier profiling. Being at the forefront in
tackling the roadblocks to continued technology scaling means we
have the most stringent requirements.”
About Dimension Icon SSRM-HR
Dimension Icon SSRM-HR constitutes a new AFM configuration that
integrates the large stage, low drift, and finest force control of
the Dimension Icon platform with the Scanning Spreading Resistance
Microscopy (SSRM) application module, SSRM-DIA probes, and high-end
environmental control. Following seamless sample transfer from a
high vacuum sample preparation chamber, oxygen and water are
controlled at the 1ppm level during AFM imaging. The environmental
control system is compatible with all released Dimension Icon
accessories and application modules, further extending its benefits
to additional applications.
About Bruker Corporation
Bruker Corporation (NASDAQ: BRKR) is a leading provider of
high-performance scientific instruments and solutions for molecular
and materials research, as well as for industrial, diagnostics and
applied analysis. For more information about Bruker Corporation,
please visit www.bruker.com.
About Imec
Imec performs world-leading research in nanoelectronics. Imec
leverages its scientific knowledge with the innovative power of its
global partnerships in ICT, healthcare and energy. Imec delivers
industry-relevant technology solutions. Imec is headquartered in
Leuven, Belgium, and has offices in Belgium, the Netherlands,
Taiwan, US, China, India and Japan. Further information on Imec can
be found at www.imec.be.
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