Trikon's Omega fxP for Silicon Trench Etching Nominated by European Semiconductor Magazine for Best Wafer Processing Tool
June 15 2005 - 6:55PM
PR Newswire (US)
Trikon's Omega fxP for Silicon Trench Etching Nominated by European
Semiconductor Magazine for Best Wafer Processing Tool NEWPORT,
Wales, June 15 /PRNewswire-FirstCall/ -- Trikon Technologies, Inc.
(NASDAQ:TRKN), a leading provider of wafer fabrication equipment
and services to the global semiconductor industry, announced today
that its Omega fxP for silicon trench etching has been short listed
for best tool in the Eurosemi IC Industry Wafer Processing
category. Trikon's Omega fxP is equipped with in-situ
interferometric end-point detection (IEPD) allowing semiconductor
producers to achieve better yields at lower costs. "Leading power
device makers that have recently switched to using Omega ICP
etchers in production are benefiting from our industry-leading
depth control," commented president and CEO of Trikon Technologies,
Dr. John Macneil. "In turn, this leads to higher device yields and
lower overall costs through reduced scrap. A major reason for these
improvements is the use of IEPD." Dr. Macneil explained, "In a
power MOSFET device the depth control of the front-end silicon
trench is critical to the performance of the final device. IEPD
continuously records the progress of the etch front and
automatically terminates the process at a pre-programmed depth."
The Eurosemi IC Industry Awards will be announced during SEMICON
West, a major industry trade show to be held July 12-14 of this
year. The voting period is still open, and individuals may submit
their votes at http://www.eurosemi.eu.com/. The awards are given to
highlight innovation and best practice in the IC industry where
technical achievement is expected and every decision and idea is a
potential breakthrough. The awards focus on the people, processes
and products that drive the industry forward. They are aimed to
recognize the vital individuals and companies that enable a company
to achieve success in a competitive global market. About Trikon
Technologies Trikon Technologies is a leading provider of wafer
fabrication equipment and services to the global semiconductor
industry. Trikon develops and manufactures advanced capital
equipment for plasma etching and chemical and physical vapor
deposition (CVD and PVD) of thin films for use in the production of
semiconductor, MEMS and similar devices. These are key components
in most advanced electronic products, such as telecommunication
devices, consumer and industrial electronics and computers. More
information is available at: http://www.trikon.com/. DATASOURCE:
Trikon Technologies, Inc. CONTACT: Katrina Bomont, Marketing
Publicity Manager of Trikon Technologies, Inc., +44 (0) 1633
414030, or ; or Stew Chalmers of Positio, +1-818-980-3762, or , or
investors, Kevin Kirkeby of The Global Consulting Group,
+1-646-284-9416, or , both for Trikon Technologies, Inc. Web site:
http://www.trikon.com/
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