ASSLAR, Germany, April 16, 2012 /PRNewswire/ -- With the gas
analysis systems Sputter Process Monitor SPM 220 and High Pressure
Analyzer HPA 220, Pfeiffer Vacuum has brought two new products onto
the market. Both system solutions are based on the proven mass
spectrometer PrismaPlus in combination with a dry compressing
HiPace turbo pumping station and are used to monitor and document
vacuum processes, such as coating architectural glass or thin-film
solar cells. The SPM 220 as well as the HPA 220 are available in
mass ranges of 1-100 and 1-200 amu; the HPA 200 is also available
for 1-300 amu.
The Sputter Process Monitor SPM 220 is characterized by a
specially developed ion source, which enables a direct connection
between the analyzer and the process chamber. This enables the
vacuum conditions of sputter processes and similar applications to
be monitored at the precise moment up to a pressure of
10-2 mbar. An additional orifice system allows the
pressure range to expanded up to 10 mbar.
The High Pressure Analyzer HPA 220 is available, depending on
the application conditions, with three different gas inlet valves,
both manually and electropneumatically operable. Its modular design
impresses with a versatile vacuum solution for gas analysis in the
pressure range from high-vacuum to 50 mbar.
The SPM 220 as well as the HPA 220 are equipped with a number of
digital and analog inlets and outlets which enable their simple
connection to super-ordinate control systems. The newly developed
operating software is distinguished with a clearly laid out user
interface as well as simple documentation of measurement results.
Furthermore, it is possible to modify the software for special
process requirements.
The High Pressure Analyzer HPA 220. The photo with image number
7954 is available at the following link:
www.pfeiffer-vacuum.com/press_photos
About Pfeiffer Vacuum
Pfeiffer Vacuum (Stock Exchange Symbol PFV, ISIN
DE0006916604) is one of the world's leading providers of vacuum
solutions. In addition to a full range of hybrid and magnetically
levitated turbopumps, the product portfolio comprises backing
pumps, measurement and analysis devices, components as well as
vacuum chambers and systems. Ever since the invention of the
turbopump by Pfeiffer Vacuum, the company has stood for innovative
solutions and high-tech products that are used in the markets
Analytic, Industry, Research & Development, Coating,
Semiconductor and Chemistry. Founded in 1890, Pfeiffer Vacuum is
active throughout the world today. The company employs a workforce
of some 2,300 people and has more than 20 subsidiaries. For more
information, please visit www.pfeiffer-vacuum.com
SOURCE Pfeiffer Vacuum
